Coating technology for locally varying optical function on 2d and 3d elements

Abstract

In this paper, a coating technology will be presented that allows achieving a locally varying optical function on 2d and 3d elements. This can be used, for example, to compensate layer thickness errors occurring during the deposition on tilted surfaces of larger 3d optical components. Other applications can be coatings for lateral varying light extraction of large-area waveguides in displays, wave front correction or variable optical filters for hyper spectral cameras. In the coating plant PreSensLine at FEP (by Von Ardenne GmbH) deposition rates in the range of 20 to 50 nm∙m/min allow efficient fabrication of optical layer systems for use in IR,VIS and UV