High-Voltage Actuation System for Future Generation Lithography systems - Power Amplifier

Abstract

Current motion systems in lithography machines operate at a bus voltage of 600V after a steady increase in the past decades. Increasing the voltage has the advantage of delivering more power without the cost of an increase in mass and volume of power cables. However, this requires a significant breakthrough in power amplifier technology since fast switching MOSFETs can only be used reliably up to 600 V and for higher voltages only slower switching devices are available