Phase-stepping interferometry of GaAs nanowires: determining nano-wire radius

Abstract

Phase stepping interferometry is used to measure the size of near-cylindrical nanowires. Nanowires with nominal radii of 25 nm and 50 nm were used to test this by comparing specific measured optical phase profile values with theoretical values calculated using a wave-optic model of the Phase stepping interferometry (PSI) system. Agreement within 10% was found, which enabled nanowire radii to be predicted within 4% of the nominal value. This demonstration highlights the potential capability for phase stepping interferometry to characterize single nanoparticles of known geometry in the optical far-field.This research was supported by Australian Research Council Grant Nos. LE110100024 and DP130102674, a Macquarie University Research Development Grant, and the Australian National Fabrication Facility (ANFF)