Multiphysics analyses of the effect of package on the performances of PMUT transducers

Abstract

The paper deals with the multiphysics modeling of piezoelectric micromachined ultrasound transducers (PMUT), that can be used in several practical applications. The model accounts for the multiple couplings between the mechanical fields and the electric and acoustic ones. The numerical solution has been sought by means of the finite element method, for the special case of axial symmetry. The model has been validated with reference to experimental data, that have been obtained by the Authors. The numerical procedure has been applied to carry out a parametric analysis of the effect of package, to extract a set of design guidelines