In this paper we present the methodology and the
numerical results related to the analysis of aging of the SU-
8 polymer when used as a primary layer for the realization
of Coplanar Waveguide (CPW) structures. As test devices,
we used a set of transmission lines with different lengths and
T-shaped open stubs shunt resonators; by using these
geometries, we are able to acquire the data in a broadband
range, in principle between 1 GHz and 40 GHz. We conduct
the analysis by comparing two different technology run: the
first wafer with a deposited layer by a 12-year-old SU-8 and
the second wafer, with the same photolithographed metallic
geometries, with a brand-new processed SU-8 photoresist