Growth of bulk SiGe single crystals by liquid phase diffusion method: experimental and computational aspects

Abstract

SiGe is an emerging semiconductor material with many promising applications in high-speed micro electronics and thermo-photovoltaics. In light of significant differences in physical properties of constituent elements, it is still a challenge to grow bulk SiGe single crystals with uniform composition and low defect density. Thus, it is essential to scrutinize the solidification behaviour of SiGe system. Hence, this book presents a combined experimental and modelling study for the growth of SiGe single crystals by a new solution growth process called Liquid Phase Diffusion (LPD). Following a brief introduction of the subject, the crystal structure, phase diagram, growth techniques used for producing SiGe single crystals and their place in the overall scheme of SiGe alloy systems are presented. The development of a macroscopic mixture model is presented to model the LPD growth system. The LPD growth system is examined using two- and three-dimensional transient simulations. The design, construction, and testing of the LPD growth system are presented along with the experimental results and characterization of grown crystals

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