Innovative Mechanisms for Precision Assembly and Actuation of Arrays of Nanowire Oscillators

Abstract

Bottom-up assembling of Micro/Nano Electromechanical System (MEMS/NEMS) devices from nanoscale building blocks is highly desirable but extremely difficult to achieve. In this work, we report innovative mechanisms for precision assembly and actuation of arrays of nanowire NEMS devices that can synchronously oscillate between two designated positions for over 4000 cycles. The assembly and actuation mechanisms are based on unique magnetic interactions between nanoentities with perpendicular magnetic anisotropy (PMA) and electric-tweezer manipulation, our recent invention. Quantitative analysis of the dynamics of torques involved in the nano-oscillators reveals that the induced electrostatic torques due to the external electric fields between metallic NEMS components play a significant role in the mechanical actuation. These new findings are expected to inspire new in situ assembly and actuation strategies in the general field of NEMS devices such as nanomechanical switches for toggling on/off circuits and nanoresonators for biochemical sensors and radio frequency communication