Finger Probe Array for Topography-Tolerant Scanning
Electrochemical Microscopy of Extended Samples
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Abstract
Scanning electrochemical microscopy
with soft microelectrode array
probes has recently been used to enable reactivity imaging of extended
areas and to compensate sample corrugation perpendicular to the scanning
direction. Here, the use of a new type of microelectrode arrays is
described in which each individual microelectrode can independently
compensate corrugations of the sample surface. It consists of conventional
Pt microelectrodes enclosed in an insulating glass sheath. The microelectrodes
are individually fixed to a new holder system by magnetic forces.
The concept was tested using a large 3D sample with heights up to
12 μm specially prepared by inkjet printing. The microelectrodes
follow the topography in a constant working distance independently
from each other while exerting low pressure on the surface