Inert
Gas Enhanced Laser-Assisted Purification of Platinum Electron-Beam-Induced
Deposits
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Abstract
Electron-beam-induced deposition
patterns, with composition of PtC<sub>5</sub>, were purified using
a pulsed laser-induced purification reaction to erode the amorphous
carbon matrix and form pure platinum deposits. Enhanced mobility of
residual H<sub>2</sub>O molecules via a localized injection of inert
Ar–H<sub>2</sub> (4%) is attributed to be the reactive gas
species for purification of the deposits. Surface purification of
deposits was realized at laser exposure times as low as 0.1 s. The
ex situ purification reaction in the deposit interior was shown to
be rate-limited by reactive gas diffusion into the deposit, and deposit
contraction associated with the purification process caused some loss
of shape retention. To circumvent the intrinsic flaws of the ex situ
anneal process, in situ deposition and purification techniques were
explored that resemble a direct write atomic layer deposition (ALD)
process. First, we explored a laser-assisted electron-beam-induced
deposition (LAEBID) process augmented with reactive gas that resulted
in a 75% carbon reduction compared to standard EBID. A sequential
deposition plus purification process was also developed and resulted
in deposition of pure platinum deposits with high fidelity and shape
retention