Electron Beam-Induced Writing of Nanoscale Iron Wires on a Functional Metal Oxide

Abstract

Electron beam-induced surface activation (EBISA) has been used to grow wires of iron on rutile TiO₂(110)-(1 × 1) in ultrahigh vacuum. The wires have a width down to ∼20 nm and hence have potential utility as interconnects on this dielectric substrate. Wire formation was achieved using an electron beam from a scanning electron microscope to activate the surface, which was subsequently exposed to Fe­(CO)₅. On the basis of scanning tunneling microscopy and Auger electron spectroscopy measurements, the activation mechanism involves electron beam-induced surface reduction and restructuring