Simulation of Micro-Electronic FlowFET Systems

Abstract

A microelectronic fluidic system has been investigated by modeling and 3D simulation of fluid flow controlled by an applied gate voltage. The simulations have helped to characterize a novel FlowFET (a fluidic Field Effect Transistor) device under fault-free conditions. The FlowFET operates by applying a voltage field from a gate electrode in the insulated side wall of a microchannel to modulate the ␣-potential at the shear plane [1]. The change in ␣-potential can be used to control both the magnitude and direction of the electroosmotic flow in the microchannel