The microflown

Abstract

This thesis deals with a novel acoustic sensor, the microflown. This micromachined sensor is capable of measuring the particle velocity directly. When both particle velocity and acoustic pressure variations are known an acoustic phenomena can be fully described. The microflown is a microphone which consists of two temperature sensors and a heater. The particle velocity alters the temperature distribution and thus the temperature of both the sensors. The temperature difference of both sensors is proportional with the particle velocity