Al2O3 is commonly used as host material for Er3+-doped integrated optical amplifiers. In this paper, a Graeco-Latin square is used in DC reactive magnetron sputtering deposition experiment in order to get low optical losses Al2O3 layer. By reasonable selection and careful arrangement of experimental parameters, an optimal combination of deposition parameters is obtained via statistic analysis with the fewest experimental runs. The result forms the base for the further fabrication of Er3+-doped Al2O3 layer. The Graeco-Latin square experiment can also be used to investigate the influence of each parameter on the deposition rate of Al2O3 layer
