A six degrees of freedom MEMS manipulator

Abstract

This thesis reports about a six degrees of freedom (DOF) precision manipulator in MEMS, concerning concept generation for the manipulator followed by design and fabrication (of parts) of the proposed manipulation concept in MEMS. Researching the abilities of 6 DOF precision manipulation in MEMS is part of the Multi Axes Micro Stage (MAMS) project in which the disciplines of precision engineering, control engineering and micro mechanical engineering are represented