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Ultralow-k dielectrics made by supercritical foaming of thin polymer films
Authors
Geert-Henk Koops
Bernd Krause
+4Â more
Jan van Turnhout
Nico F.A. van der Vegt
Matthias Wessling
Michel Wubbenhorst
Publication date
1 January 2002
Publisher
WILEY-VCH Verlag
Doi
Abstract
Abstract is not available.
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