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大流量压阻式流量传感器的研制
Authors
张大成
王小保
钱劲
Publication date
1 January 2003
Publisher
Abstract
根据流体力学差压原理 ,采用硅微机械加工手段设计制作了微挡板结构的压阻式流量传感器。测试结果表明 ,该传感器具有测量 0 .1~ 10L/min的气体流量的能
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Institutional Repository of Peking University
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Last time updated on 20/04/2018
Institute Of Mechanics,Chinese Academy of Sciences
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Last time updated on 12/02/2018