Restructuring TCAD System: Teaching Traditional TCAD New Tricks

Abstract

Traditional TCAD simulation has succeeded in predicting and optimizing the device performance; however, it still faces a massive challenge - a high computational cost. There have been many attempts to replace TCAD with deep learning, but it has not yet been completely replaced. This paper presents a novel algorithm restructuring the traditional TCAD system. The proposed algorithm predicts three-dimensional (3-D) TCAD simulation in real-time while capturing a variance, enables deep learning and TCAD to complement each other, and fully resolves convergence errors.Comment: In Proceedings of 2021 IEEE International Electron Devices Meeting (IEDM