TANOS (TaN, Al2O3, Si3N4, SiO2, Si) Charge-trap Flash Devices

Abstract

Goal: To demonstrate charge-trapping in a TANOS Stack at RIT Gate stack film depositions determined by experimentation, testing C-V structures fabricated and tested by patterning gate stack with GCA C-V Mask. NMOS charge-trap flash devices currently being fabricated with modified version of AdvCMOS150 Process w/ TANO gate stack

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