CORE
🇺🇦
make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
一种掺杂类金刚石薄膜及其制备方法
Authors
孙丽丽
徐胜
+4 more
李晓伟
汪爱英
王骏
郭鹏
Publication date
30 September 2015
Publisher
Abstract
本发明提供一种掺杂类金刚石薄膜的制备方法,其包括如下步骤:a根据第一性原理计算模拟金属原子与碳原子的成键特征,筛选出与碳原子具有反键特征的掺杂金属元素;b通过离子束法形成类金刚石薄膜,并在类金刚石薄膜的成膜过程中通过磁控溅射法向所述类金刚石薄膜掺杂至少一种该掺杂金属元素,得到掺杂类金刚石薄膜,其中该掺杂金属元素的原子百分含量为0.13%~40%。本发明还提供一种掺杂类金刚石薄膜
Similar works
Full text
Available Versions
Institutional Repository of Ningbo Institute of Material Technology & Engineering, CAS
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:ir.nimte.ac.cn/:174433/159...
Last time updated on 22/01/2018