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一种金刚石针尖阵列模板压印纳米孪晶化表面制造方法
Authors
张振宇
段能东
+3 more
江南
王博
郭东明
Publication date
6 April 2016
Publisher
Abstract
一种金刚石针尖阵列模板压印纳米孪晶化表面制造方法,属于纳米孪晶化表面制造技术领域。其特征是采用光刻技术在硅片表面刻蚀出倒金字塔坑阵列,作为金刚石针尖阵列生长的母版。采用微波等离子化学气相沉积方法生长带有均匀排列的金刚石针尖阵列的金刚石模板,用氢气和甲烷进行金刚石模板的生长。采用氢氟酸和硝酸的混合溶液刻蚀硅基板,形成金刚石针尖阵列模板,针尖的曲率半径为100-900nm,高度为18-30μm,长、宽和间距为几十个μm,金刚石针尖的尺寸和形状均匀一致,针尖阵列排列均匀。采用平方厘米量级的金刚石针尖阵列模板作为压印工具,工具或样品在X和Y方向作微米量级移动。本发明的效果和益处是实现了大面积纳米孪晶化表面制造方法
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Last time updated on 22/01/2018