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化学气相沉积设备
Authors
刘兆平
汪伟
白晓航
Publication date
31 May 2017
Publisher
Abstract
本发明公开了一种化学气相沉积设备,包括基底存放腔室、样品收集腔室、反应腔室、过渡腔室及将基底料带由基底存放腔室运送至样品收集腔室的物料输送装置,基底存放腔室、样品收集腔室、反应腔室和过渡腔室形成密闭的输料通道,反应腔室和过渡腔室位于基底存放腔室和样品收集腔室之间,且反应腔室至少为两个,相邻两个反应腔室通过过渡腔室间隔。物料输送装置包括位于基底存放腔室的第一卷绕传送装置及位于样品收集腔室的第二卷绕传送装置。本申请提供的化学气相沉积设备有效地抑制相邻反应腔之间的反应气体的扩散,使得各个反应腔室能够独立的实现预定的功能
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Last time updated on 22/01/2018