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一种快速、准确比较类金刚石薄膜结构中金刚石相及石墨相含量的方法
Authors
张栋
柯培玲
+3 more
汪爱英
王丽
郭鹏
Publication date
24 November 2017
Publisher
Abstract
本发明公开了一种快速、准确比较类金刚石薄膜结构中金刚石相及石墨相含量的方法。该方法利用金刚石相对于红外光具有高透过低吸收的特性,而石墨相恰恰相反的特性通过测量待比较的类金刚石薄膜的红外光透过的高低而得到其中金刚石相以及石墨相含量的高低。与现有技术相比,本发明方法能够快速、准确地比较类金刚石薄膜结构中金刚石相及石墨相含量,并且适用的膜厚范围宽
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Last time updated on 22/01/2018