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太阳能电池氧化硅层的制备方法及太阳能电池
Authors
叶继春
廖明墩
+5 more
曾俞衡
王丹
童慧
蔡亮
高平奇
Publication date
22 February 2017
Publisher
Abstract
本发明提供一种氧化硅层的制备方法,所述制备方法包括以下步骤:将硅片置于混合酸液中进行氧化处理,所述混合酸液为硝酸、硫酸混合液;其中,所述硝酸、硫酸混合液由68%的浓硝酸、98%的浓硝酸按体积比1:1~10:1混合而成。上述氧化硅层的制备方法,1)可以实现对硅表面更加高效的氧化效果,氧化硅层的硅被氧化的更加彻底,高价态的硅比例升高;2)制备温度低,可以在低至20℃的条件下制备出厚度大于1.4nm的氧化硅层,满足制备太阳能电池的需要;3)处理时间缩短,例如可以在2~4min制备出厚度大于1.4nm的氧化硅层;4)氧化层厚度合适,制备的氧化硅层可以控制在1.0~3.0nm,氧化硅层厚度可以完全覆盖器件所需的厚度要求
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Last time updated on 22/01/2018