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线性离子束源装置及利用该装置沉积类金刚石碳薄膜的方法
Authors
代 伟
吴国松
孙丽丽
汪爱英
Publication date
7 October 2009
Publisher
Abstract
本发明涉及一种线性离子束源装置及利用该装置沉积类金刚石碳薄膜的方法,该装 置包括有:阴极(1),阳极(2),阴极(1)和阳极(2)之间形成有电离区域(7),用于将可电离 的气体引导进入所述电离区域(7)的气体供应通道(4),以及用于在所述电离区域(7)产生 磁场分布的磁体(3),其特征在于:阴极(1)上开设有一环形缝隙(13),从而将阴极(1)分割 为处于环形缝隙(13)中间的第一阴极(11)和处于环形缝隙(13)外围的第二阴极(12),而阳 极(2)也呈环形结构,并且阳极(2)置于与阴极(1)的环形缝隙(13)相对应的位置。与现有技 术相比,本发明提供的装置能在较大尺寸范围内产生连续均匀的离子束流。本发明提供 的方法所制备的薄膜具有硬度高、膜/基结合力好、表面光滑、摩擦系数低、厚度均匀的 特点
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Last time updated on 22/01/2018