This paper deals with an Integrated
Circuits (ICs) compatible MEMS technology, which
is used to elaborate an ultra compact RF
communication module centered at 24GHz. This
technology uses conventional equipments and is in
adequation with millimeterwave applications. A
compatibility test protocol has consequently been
defined in order to check that each technological step
does not degrade the SiGe circuits’ performances.
Finally, the realized demonstrator present a total
surface of only 9mm²
