Birkelund, Karen

Han, Anpan

Jensen,, Flemming

Jørgensen, Anders Michael

Thanh, Hoà Lê

The present invention relates to a method for manufacturing an at least partly hollow MEMS structure. In a first step one or more through-going openings is/are provided in core material. The one or more through-going openings is/are then covered by an etch-stop layer. After this step, a bottom electrically conducting layer, one or more electrically conducting vias and a top electrically conducting layer are created. The bottom layer is connected to the vias and vias are connected to the top layer. The vias are formed by filling at least one of the one or more through-going openings. The method further comprises the step of creating bottom and top conductors in the respective bottom and top layers. Finally, excess core material is removed in order to create the at least partly hollow MEMS structure which may include a MEMS inductor.</p

Online Research Database In Technology

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A method for manufacturing a hollow mems structure

http://orbit.dtu.dk/ws/files/140017951/WO2017108218A1.pdf

A method for manufacturing a hollow mems structure

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