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3D Monte Carlo model for simulation of ALD on complex substrates
Authors
Sara Bals
Nathalie Claes
+8 more
Véronique Cremers
Jolien Dendooven
Christophe Detavernier
Filip Geenen
Thais Milagres de Oliveira
Kornelius Nielsch
Martin Waleczek
Robert Zierold
Publication date
1 January 2017
Publisher
Abstract
Abstract is not available.
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Ghent University Academic Bibliography
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oai:archive.ugent.be:8538402
Last time updated on 06/12/2017