Heterogene Integration einer Miniatur-Solarzelle für autarke Sensoren

Abstract

In this contribution we present a silicon-based miniature solar cell that can be integrated heterogeneously onto a CMOS chip developed by Fraunhofer IMS. The solar cell is bonded onto the CMOS chip and serves as the electrical power supply of the sensor system. Furthermore the bonded solar cell can be used as a chip-scale-package for the sensor, thereby enabling a compact and cost-effective sensor node having minimal dimensions. The solar cell is manufactured using well-established methods of semiconductor process technology and bonded onto the CMOS chip using CMOS compatible methods