Burnett, Timothy

Frankel, Philipp

Garner, Alistair

Goulden, J

Lindsay, J

Winiarski, Bartlomiej

Withers, Philip

The integration of electron backscattered diffraction (EBSD) and energy dispersive spectroscopy (EDS) on scanning electron microscopes (SEM) is an increasingly common method of characterising materials. EDS offers chemical quantification and spatial distribution of the elements whilst EBSD enables microstructural characterisation. The integration of these two techniques with simultaneous acquisition, as in the AZtec platform, enables full material characterisation and data correlation within a single user interface

Developments in Large Volume 3D Analysis via P-FIB: EBSD & EDS

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