Preparation of Nanocomposites of Metal Oxides in Plasma Polymer and Study of Their Properties

Abstract

Title: Preparation of Nanocomposites of Metal Oxides in Plasma Polymer and Study of Their Properties Author: Oleksandr Polonskyi Department: Department of Macromolecular Physics, MFF UK Supervisor of the doctoral thesis: Prof. RNDr. Hynek Biederman, DrSc. Department of Macromolecular Physics, Faculty of Mathematics and Physics, Charles University in Prague Abstract: This thesis is devoted to a study of nanocomposite films Al (Al oxide)/plasma polymer prepared by various techniques using magnetron sputtering, plasma polymerization and cluster beam deposition. The formation and deposition of metal/metal oxide nanoclusters using a gas aggregation cluster source (GAS) was also considered. The role of low concentration of oxygen in the aggregation gas on the process of Al and Ti cluster deposition was studied. Properties of the nanoclusters and nanocomposite films were characterized by various techniques. Morphology of the nanocomposites was examined by AFM, TEM or HRTEM and SEM. Elemental analysis and chemical composition of the films were studied by XPS and FTIR. Optical characterization of the prepared films was done by UV-Vis spectroscopy and spectroscopic ellipsometry. It has been shown that using GAS nanocomposite Al(AlxOy)/C:H may be prepared. Keywords: nanocomposite thin film, plasma polymer, metal..