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Inhibition of Oxygen Scavenging by TiN at the TiN SiO2 Interface by Atomic Layer Deposited Al2O3 Protective Interlayer
Authors
V.V. Afanas ev
E.O. Filatova
+3Â more
S.A. Kasatikov
A.S. Konashuk
S.S. Sakhonenkov
Publication date
1 January 2019
Publisher
Abstract
Abstract is not available.
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oai:helmholtz.HZB:99722
Last time updated on 05/12/2019