A method of producing tris (N-methylamine) methylsilane is described including the steps of forming and cooling a liquid solution of methylamine in an inert solvent and under an inert atmosphere at a temperature of about -30 C and slowly adding a quantity of methyltricholorosilane while maintaining said temperature. The reaction mixture is then heated for about 60 minutes at a temperature of about 40 C, followed by filtering the solid portion from the liquid portion. The liquid is distilled to remove the solvent, resulting in a high yield of tris (N-methylamine) methylsilane
