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research
Ultra-high molecular sink vacuum chamber
Authors
J. B. Stephens
S. P. Yager
Publication date
1 June 1970
Publisher
Abstract
Double-wall vacuum chamber can be separated from the remainder of the system and pumped by ultra-clean techniques. Ultrahigh vacuum is maintained by the cryogenic effect of a cold wall and titanium chemisorption
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Last time updated on 31/05/2013