Report details the test and inspection procedures for the mass production of high reliability integrated circuits. It covers configuration control, basic fundamentals of quality control, control charts, wafer process evaluation, general process evaluation, evaluation score system, and diffusion evaluation

Spangenberg, E.

English

NASA Technical Reports Server

December 1967
	 Brief 67-10507 
NASA TECH BRIEF 
NASA Tech Briefs are issued to summarize specific innovations derived from the U.S. space program, 
to encourage their commercial application. Copies are available to the public at 15 cents each 
from the Clearinghouse for Federal Scientific and Technical Information, Springfield, Virginia 22151. 
Test and Inspection for Process Control of Monolithic Circuits 
In the preparation and production of monolithic 
circuits, an effort was made to provide quality assur-
ance procedures for the mass production of high 
reliability integrated circuits at a reasonable cost. 
Many of the controls suggested would be too 
stringent for engineering model shop work or for a 
small quantity prototype order, but these same con-
trols provide a basis for a homogeneous process in 
moderate or mass production quantities. 
A report has been prepared detailing the test and 
inspection procedures, which covers the following 
areas:
Configuration Control 
Basic Fundamentals of Quality Control 
Control Charts 
Wafer Process Evaluation 
Process Evaluation 
Evaluation Score System 
Diffusion Evaluation
Wafer Scribing 
Bonding Operation 
Test Controls 
Copies of the report, Test and Inspection for Process 
Control of Monolithic Circuits, by Edward Spangen-
berg, et a!, Westinghouse Electric Corporation, 
February 25, 1967, are available from: 
Technology Utilization Officer 
Marshall Space Flight Center 
Huntsville, Alabama 35812 
Reference: B67-10507 
Patent status: 
No patent action is contemplated by NASA. 
Source: E. Spangenberg 
of Westinghouse Electric Corporation 
under contract to 
Marshall Space Flight Center 
(M FS- 13084) 
Category 01 
This document was prepared under the sponsorship of the National 
Aeronautics and Space Administration. Neither the United States 
Government nor any person acting on behalf of the United States
Government assumes any liability resulting from the use of the 
information contained in this document, or warrants that such use 
will be free from privately owned rights.
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Test and inspection for process control of monolithic circuits

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