Abnormally large variation of capacitance with temperature is obtained in thin film capacitors when a fixed ionic space charge is present in sufficient density in a dielectric film. This effect is the basis for a new kind of thin film thermal detector, whose performance at room temperature equals or exceeds that of comparable devices at much lower temperatures

Maserjian, J.

English

NASA Technical Reports Server

December 1967	 Brief 67-10505 
NASA TECH BRIEF 
NASA Tech Briefs are issued to summarize specific innovations -derived from the U.S. space program, 
to encourage their commercial application. Copies are available to the public at 15 cents each 
from the Clearinghouse for Federal Scientific and Technical Information, Springfield, Virginia 22151. 
Thin Film Thermal Detector 
During investigations with thin dielectric films, it 
was discovered that, an abnormally large variation of 
capacitance with temperature can be obtained in thin 
film capacitors when a fixed ionic space charge is 
present in sufficient density in the dielectric film. 
This effect was made the basis for a new kind of thin 
film thermal detector, whose performance at room 
temperature equals or exceeds that of comparable 
devices at much lower temperatures. The large tem-
perature response (approximately 100 millivolts/°C), 
the low noise, and a structure that takes advantage of 
the thin film geometry to minimize thermal losses 
make possible a detectivity (figure of merit) for the 
device that approaches the theoretical maximum value 
at 300°K. The first experimental devices have detec-
tivities falling within one order of magnitude of the 
limiting value and response times of approximately 
50 milliseconds. The new thermal detector offers 
significant advantages as a temperature sensor in
systems that use digital means for data handling and 
control. Present investigations are directed toward 
methods of optimizing the structure of the device and 
forming arrays that could be used in infrared imaging 
systems. 
Note: 
Inquiries concerning this device may be directed to: 
Technology Utilization Officer 
Jet Propulsion Laboratory 
4800 Oak Grove Drive 
Pasadena, California 91103 
Reference: B67-10505 
Patent status: 
Inquiries about obtaining rights for the commercial 
use of this invention may be made to NASA, Code 
GP, Washington, D.C. 20546. 
Source: Dr. Joseph Maserjian 
(JPL-943) 
Category 01 
This document was prepared under the sponsorship of the National 
Aeronautics and Space Administration. Neither the United States 
Government nor any person acting on behalf of the United States
Government assumes any liability resulting from the use of the 
information contained in this document, or warrants that such use 
will be free from privately owned rights.
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Thin film thermal detector

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