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Prototype of calorimetric flow microsensor
Authors
Oleg Sazhin
Publication date
1 January 2012
Publisher
'AIP Publishing'
Doi
Cite
Abstract
An analytical model of calorimetric flow sensor has been developed. The results of the application of this model are utilized to develop a calorimetric flow microsensor with optimal functional characteristics. The technology to manufacture the microsensor is described. A prototype of the microsensor suitable to be used in the mass air flow meter has been designed. The basic characteristics of the microsensor are presented. © 2012 American Institute of Physics
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Institutional repository of Ural Federal University named after the first President of Russia B.N.Yeltsin
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oai:elar.urfu.ru:10995/51387
Last time updated on 17/10/2017
Crossref
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info:doi/10.1063%2F1.4769629
Last time updated on 01/04/2019