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AlAs选择性湿氮氧化的工艺条件对氧化速率的影响
Authors
吴荣汉
张益
+3 more
杜云
潘钟
黄永箴
Publication date
1 January 1999
Publisher
Abstract
结合垂直腔面发射激光器的制备,详细研究了AlAs选择性湿氮氧化工艺中氧化炉温、氮气流量、水温等条件和AlAs薄层的横向氧化速率之间的关系及其对氧化结果的影响,给出了合理的定性解释,并得到了可精确控制氧化过程及其均匀性的工艺条件。在优化的工艺条件下运用湿氮氧化制备出低阈值的InGaAs垂直腔面发射激光器
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Last time updated on 15/03/2019