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电容式微传声器的性能模拟与优化设计
Authors
刘忠立
宁瑾
Publication date
1 January 2003
Publisher
Abstract
针对所研制的电容式微传声器在理想模式下的工作原理,建立了有限元分析模型和声-电模型,从理论上分析了器件的机械性能、灵敏度以及频响特性,得出了结构优化的设计原则,即要想得到高灵敏度的微传声器器件,必须考虑采用尽可能小的空气隙厚度和声学孔尺寸以及具有较小内应力的声学振模。为采用MEMS技术制备出高性能的电容式微传声器提供了理论基础
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Last time updated on 15/03/2019