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GaAs/GaInNAs多量子阱谐振腔增强型长波长光探测器
Authors
任晓敏
吴荣汉
+6 more
周震
彭红玲
杜云
杨晓红
韩勤
黄永清
Publication date
1 January 2005
Publisher
Abstract
报道了一种具有高速响应特性的GaAs基长波长谐振强增强型(RCE)光探测器,它采用分子束外延技术(MBE)在GaAs衬底上直接生长GaAs/AlAs布拉格反射镜(DBR)和GaInNAs/GaAs多量子阱吸收层而形成,解决了GaAs系材料只能对短波长光响应的问题,实现了GaAs基探测器对长波长光的响应.该器件在峰值响应波长1 296.5 nm处获得了17.4%的量子效率,响应谱线半宽为11 nm,零偏置时的暗电流密度8.74×10-15 A/μm~2,具有良好的暗电流特性.通过RC常数测量计算得到器件的3 dB带宽为4.82 GHz
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Last time updated on 15/03/2019