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注氮工艺对SIMOX器件电特性的影响
Authors
刘忠立
张国强
+7 more
张恩霞
易万兵
李宁
王曦
范楷
郑中山
陈猛
Publication date
1 January 2005
Publisher
Abstract
研究了氮离子注入对SIMOX器件电特性的影响.氮注入SIMOX的埋氧层并退火后,将减小前栅MOS-FET/SIMOX的阈电压,提高其漏源击穿电压但对栅击穿电压影响较小.氮注入方式对SIMOX器件的I-V特性有重要影响
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Last time updated on 15/03/2019