CORE
🇺🇦
make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
用于神经电信号记录的多通道微探针
Authors
张若昕
裴为华
+3 more
陈弘达
隋晓红
鲁琳
Publication date
1 January 2006
Publisher
Abstract
以体硅为衬底,采用微机械加工技术(MEMS)制作了七通道的可植入到脑皮层的微探针,用于记录神经电信号.从生物相容性、减小植入损伤、工艺制作难度等方面考虑,制作了以二氧化硅/硅(SiO_2/Si)为主体的微探针,并详述了其具体制作工艺流程.扫描电镜(SEM)照片显示微探针针长3 mm、针宽100 μm、针厚约为20μm,各个记录点直径10μm、间距120μm,实现了各通道之间良好的信号隔离.微探针距离针尖1 mm范围内的针宽以一定弧度由100μm逐渐变窄,同时针尖锥角为6°,此种结构有利于减小植入时对脑组织的损伤.通过体外测试得到,当频率由10 kHz增加到10 MHz时,微电极各个通道阻抗由150.5 kΩ降低到6.0 kΩ
Similar works
Full text
Available Versions
Knowledge Repository of SEMI,CAS
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:ir.semi.ac.cn:172111/16541
Last time updated on 15/03/2019