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降低磷离子注入(0001)取向的4H-碳化硅电阻率的方法
Authors
孙国胜
李晋闽
+3 more
王雷
赵万顺
高欣
Publication date
4 January 2006
Publisher
Abstract
Abstract is not available.
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oai:ir.semi.ac.cn:172111/3159
Last time updated on 15/03/2019