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一种竖直式高温大功率碳化硅外延材料制造装置
Authors
孙国胜
曾一平
+3 more
李晋闽
王雷
赵万顺
Publication date
11 January 2006
Publisher
Abstract
Abstract is not available.
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oai:ir.semi.ac.cn:172111/3161
Last time updated on 15/03/2019