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X射线回摆曲线定量检测SI-GaAs势光晶片的亚表面损伤层厚度
Authors
何宏家
刘明焦
+6 more
卜俊鹏
吴让元
惠峰
曹福年
白玉珂
郑红军
Publication date
1 January 1998
Publisher
Abstract
通过测量SI-GaAs抛光晶片及其本体(腐蚀了晶片的亚表面损伤层)的X射线回摆曲线FWHM,与抛光晶片的TEM观测相结合,作出晶片回摆曲线FWHM的比率R与TEM观测的晶征亚表面损伤层厚度D的关系曲线,建立了一种定量检测SI-GaAa抛光晶片的片表面损伤层厚度技术,文中将对这种技术进行描述并作讨论
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Last time updated on 29/11/2016