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Characterization of capacitive MEMS at cryogenic temperatures
Authors
L.J. Fernandez
Jakob Flokstra
+4 more
J.M. Reitsema
J. Sesé
M.C. van Essen
Remco J. Wiegerink
Publication date
5 September 2004
Publisher
Abstract
Abstract is not available.
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NARCIS
See this paper in CORE
Go to the repository landing page
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Last time updated on 15/10/2017
NARCIS
See this paper in CORE
Go to the repository landing page
Download from data provider
Last time updated on 15/10/2017