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Parylene-H 박막을 절연막으로 이용한 실리콘 바이오센서의 DC 특성 및 신뢰성 분석
Authors
WONYEONG CHOI
KIM DONGHOON
+4 more
BO JIN
JEONG SOO LEE
CHANOH PARK
SEONG HWAN SHIN
Publication date
21 December 2018
Publisher
반도체공학회
Abstract
2
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포항공과대학교
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oai:oasis.postech.ac.kr:2014.o...
Last time updated on 30/04/2019