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Silicon Nitride layers obstained by ECR PECVD
Authors
J. Holleman
I.G. Isai
Hans Wallinga
P.H. Woerlee
Publication date
27 November 2002
Publisher
'Towarzystwo Naukowe W Toruniu'
Abstract
Abstract is not available.
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NARCIS
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Last time updated on 14/10/2017
University of Twente Research Information
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oai:ris.utwente.nl:publication...
Last time updated on 12/07/2023