The mechanism of thermal pore generation in organosilicate thin films loaded with a six-armed star-shaped poly(epsilon-caprolactone) porogen was quantitatively investigated by using in-situ grazing-incidence small-angle X-ray scattering and thermogravimetry. These analyses found that the blend components have a limited miscibility that depends on the compositionfor porogen loadings up to only 20 wt%, molecularly miscible blend films were obtained. Even for the miscible blend films, heating the films produced a curing reaction of the precursor matrix component, leading to the phase separation of the porogen component. This phase separation was found to begin at 393 K for 10 wt% porogen loaded films and at 373 K for 20 wt% porogen loaded films, and to continue for temperatures up to 423 K. The porogen aggregates remained and were confined within the matrix film without any further growth or movement until complete thermal decomposition above 564 K.ope
