Low temperature Cu thin film growth by pulsed metal-organic chemical vapor deposition using (hexafluoroacetylacetonate)Cu(I)(3,3-dimethyl-1-butene)

Authors
Publication date
1 February 2003
Publisher
포항공과대학교

Abstract

Maste

    Similar works

    Full text

    thumbnail-image

    Available Versions

    포항공과대학교

    redirect
    oaioai:oasis.postech.ac.kr:2014.o...
    Last time updated on 08/08/2018