This paper was presented at the 3rd Micro and Nano Flows Conference (MNF2011), which was held at the Makedonia Palace Hotel, Thessaloniki in Greece. The conference was organised by Brunel University and supported by the Italian Union of Thermofluiddynamics, Aristotle University of Thessaloniki, University of Thessaly, IPEM, the Process Intensification Network, the Institution of Mechanical Engineers, the Heat Transfer Society, HEXAG - the Heat Exchange Action Group, and the Energy Institute.The coexistence of rarefied continuum flow regime areas and relatively small elements in which rarefaction effects become important is a typical feature of many complex gas flows micro systems. In rarefied domains, the mean free path of gas molecules is comparable or larger than a characteristic scale of the system. These domains are naturally described by kinetic equation for the velocity distribution function, which involve a considerable effort in terms of CPU time and memory requirements, due to the discretization in both physical and velocity space. The continuum domains are best described by the fluid Navier Stokes (NS) equations in terms of average flow velocity, gas density and temperature. These equations are more efficient, but less accurate in critical rarefied areas. Thus, the development of hybrid solver combining kinetic and continuum models is of great interest especially for applications range from gas flows in micro systems to the aerospace applications, such as high altitude flights. The pressure–driven gas flow of rarified monatomic gas through a two-dimensional short microchannel is considered using hybrid solver. The calculations have been carried out for pressure ratios 0.1, 0.5 and 0.9 and fixed relatively large Knudsen number. The applicability of the solver is discussed via comparison with the kinetic and NS solutions.The European Community's Seventh Framework Programme FP7/2007-2013 under grant agreement ITN GASMEMS no 215504
